Folks,

  I'm looking for a short term solution for etching transition metals using
chlorinated chemistry in a dry etch reactor. Finding a foundry that has
dry etch services for hire is a near impossibility, as thin film depositions
seem to be the only processes one can request of a wafer provider/
thin film foundry. Are there any small operations or university-level fabs
that someone can pass on as a possibility for this work? Thanks in
advance for any contact information (I'll discuss more details with any
interested parties.)

John

John M. Koons
Process Engineer
Innovative Micro Technology
805-681-2816
[email protected]