Dear colleagues
By accident, our team came up with an exciting development of a new
MEMS process for fabrication a large area, free standing ultra-thin
membranes (typical size 10-20 mmsqr, 5-20 nanometer thick!). These
composite membranes are surprisingly robust.
I am looking for potentials application, I will be happy to discuss them
with someone, particularly in the field of uncooled IR detectors and
MOEMS.
Thank you for any help you can offer.
Jovan Matovic
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Jovan MATOVIC |Tel: (++381) 11 630 - 757
University of Belgrade,IHTM - CMTM |Fax: (++381) 11 182 - 995
Njegoseva 12,11000 Beograd, Yugoslavia |email: [email protected]
TU - Wien, Austria
Institut fur Feinwerktechnik
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