Dear colleagues,

I will like to find model(s) discussing step coverage of trenches and
pillars of various dimensions with
a) common photoresist;
b) CVD deposited films;
c) HDP deposited films;
d) ALCVD deposited films.

I hope I can have model(s) that describe situations for isolated
trenches/pillars and dense trenches/pillars.

Please kindly help. It's fairly urgent.

Rgds,
Randall
DL, Singapore