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MEMSnet Home: MEMS-Talk: Metal adhesion on Teflon AF 2400
Metal adhesion on Teflon AF 2400
2001-09-14
Pancham R. Patel
2001-09-14
Mighty Platypus
2001-09-14
Thor Osborn
Metal adhesion on Teflon AF 2400
Pancham R. Patel
2001-09-14
Hello All,

I am presently interested in patterning chromium on a Teflon AF 2400 film.
But, I am having problems adhering chromium metal on these films.

My procedure:
1. Evaporate 1500 A of chromium on a Teflon Film.
2. Spin 1818 and then expose it to 405nm UV light.
3. Remove chrome using CEN-300 chrome-etchant.
4. Remove unexposed 1818 using 1112A stripper.

The whole chromium metal film gets removed in the stripper.

Has anybody encountered this problem?
Which metal adheres better to Teflon?

Thanks in advance,
Regards,
Pancham R. Patel.
Research Assistant.
University of Illinois, Chicago.


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