We've done some work with Teflon AF, but we never put a metal coat on top
of it. When we tried to spin PR on Teflon, we had to roughen it with O2
plasma (RIE, same as PR removal/descum, 10 seconds). Otherwise, PR
wouldn't stick to the teflon. So, if you roughen it, your Ti might stick.

Jesse Fowler
  UCLA/MAE Dept., 420 Westwood Plaza, Room 18-121, ENGR IV
  Los Angeles, CA 90095-1597 | (310)825-3977
"...they have learned to expect the unpredictable from crafty bacteria..."
  --Emma Ross, AP Medical Writer, 19 July 2001

On Fri, 14 Dec 2001, Pancham R. Patel wrote:

> Hello All,
>
> I am presently interested in patterning chromium on a Teflon AF 2400 film.
> But, I am having problems adhering chromium metal on these films.
>
> My procedure:
> 1. Evaporate 1500 A of chromium on a Teflon Film.
> 2. Spin 1818 and then expose it to 405nm UV light.
> 3. Remove chrome using CEN-300 chrome-etchant.
> 4. Remove unexposed 1818 using 1112A stripper.
>
> The whole chromium metal film gets removed in the stripper.
>
> Has anybody encountered this problem?
> Which metal adheres better to Teflon?
>
> Thanks in advance,
> Regards,
> Pancham R. Patel.
> Research Assistant.
> University of Illinois, Chicago.
>
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