If your air gaps are thinner, you may have to refer to Paschen curves.
Thanks,
Pancham.

>
> Message: 2
> Date: Tue, 02 Oct 2001 11:32:57 -0700
> From: Lidu Huang 
> Organization: Fujitsu Laboratories of America
> To: [email protected]
> Subject: [mems-talk] Electric breakdown in MEMS air gap
>
> Hi,
>
> Could someone provide some data on electric breakdown
> in MEMS air gap?
>
> For usual electro-mechanical device, the electric field
> strength to prevent arcing is typically set at 3 (V/um).
> Would the breakdown strength be higher for MEMS devices?
>
> Thanks!
> Lidu Huang