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MEMSnet Home: MEMS-Talk: Looking for info on optical absorption data of photoreists (PMMA, etc.)
Looking for info on optical absorption data of photoreists (PMMA, etc.)
2001-11-01
Xinbing Liu
Looking for info on optical absorption data of photoreists (PMMA, etc.)
Xinbing Liu
2001-11-01
Hi,

I'm looking for some info on optical transmission data on various e-beam
lithography or photolithography resist materials, such as PMMA.  I'm
particularly interested materials that have high UV absorption when
developed.

Any response would be appreciated.  If I receive enough responses, I'll
summarize here.

Xinbing Liu

reply
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