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MEMSnet Home: MEMS-Talk: Wet etching damage for PZT with Nickel electrodes?
Wet etching damage for PZT with Nickel electrodes?
2001-11-09
Karel van Nielen
Wet etching damage for PZT with Nickel electrodes?
Karel van Nielen
2001-11-09
Hi all,

Does anyone know what happens to a film of bulk PZT with Nickel electrodes
when wet etching Silicon Dioxide with HF. Does it damages the PZT or
electrodes?

Thanks!

reply
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