Could anyone give me advice on where I can secure suitable material to attach
one very thin wafer to a thicker wafer  to provide structural strength for
the thin wafer. I also need a product that will allow good heat transfer from
one wafer to the other during an rie process to protect photoresist from heat
in the plasma. I heard of a material called Cool Grease but have no idea who
makes it. After processing I need to be able to separate the wafers with a
minimum of physical stress on the thin wafer. A chemical soak would be best.
Has anyone ever used wax to accomplish this? I appreciate your help. Thanks
in advance.
Bob Henderson
Process Integration,LLC
[email protected]