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MEMSnet Home: MEMS-Talk: DRIE STS vs ALCATEL
DRIE STS vs ALCATEL
2001-12-07
Matthieu Guirardel
2001-12-07
Sun Yu
2001-12-07
[email protected]
DRIE STS vs ALCATEL
Sun Yu
2001-12-07
In our ICP, we are not allowed to use metal masks. I heard that once a guy
used a metal mask, it cost a LOT to get the piece of equipment fixed.

Sun

At 04:18 PM 12/7/01 +0100, you wrote:
>Hello,
>
>I know that with Alcatel DRIE engines we can use Al as mask can we do it
>with STS multiplex ICP too ?
>
>Thanks for yoour help
>
>Matthieu
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