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MEMSnet Home: MEMS-Talk: H-implantation
H-implantation
2001-12-19
Jiangang Du (John Duke)
H-implantation
Jiangang Du (John Duke)
2001-12-19
Hi, guys,
I have some H-implanted silicon wafers done about eight months ago. Now I have a
concern: If the wafers are put aside for some while, will
the buried hydrogen diffuse into silicon so that the nominal project range be
obscured?





Regards,
John Duke

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