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MEMSnet Home: MEMS-Talk: poor adhesion of Pt film on Ni/NiO film
poor adhesion of Pt film on Ni/NiO film
2001-12-20
Rajesh R. Krishnan
poor adhesion of Pt film on Ni/NiO film
Rajesh R. Krishnan
2001-12-20
Hi,

I am facing poor adhesion of a 1 micron thick sputtered platinum on a
Ni-NiO film which is again sputtered on to Si wafer. When I wirebonded
gold wires to the Pt film, the Pt film came off with the wire. Any
suggestions to improve the adhesion will be appreciated.

Thank you

Rajesh

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