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MEMSnet Home: MEMS-Talk: Sputtering of Cr
Sputtering of Cr
2002-01-17
[email protected]
2002-01-17
Vic Kley
2002-01-17
Rick Williston
2002-01-17
Matthias Heschel
2002-01-17
[email protected]
Sputtering of Cr
Vic Kley
2002-01-17
Iain Watson

The Cr layer is quite conductive and no doubt reached temperatures many
times higher then the wafer substrate which also had some bulk heating
component. Not surprising at all that the Cr was oxidised under these
circumstances.

Vic

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