Allignment marks for proper orientaion of KOH mask
Brian Semak
2002-01-21
Hello everyone
Can anyone help me with some allignment marks. I am looking for allignment
marks, which ensures proper orientation of a KOH mask in the 100 plane of a
wafer. The masks I am looking for, should be etched into the wafer, thus be
used for alignment of the mask for subsequent KOH etching. If anyone here as
some ideas and suggestions, I would be very gratefull.
Med venlig hilsen/Kind regards
Brian S. Semak, M.Sc.
R&D Silicon Processing
Hymite Aps
DTU, Bygn. 325, 1st floor
2800 Lyngby
Telephone(Direct): + 45 4525 9147
Fax: + 45 4525 9156
E-mail: [email protected]
www.hymite.com