Dear Leow Cheah Wei:
Below are some papers discussing the pull-in phenomenon. Not directly for
cantilever beam, but they may be helpful.
[1] X. M. Zhang, F. S. Chau, C. Quan, Y. L. Lam and A. Q. Liu, A study of
the
static characteristics of a torsional micromirror, Sensors and Actuators A:
Physical 90 (1-2) (2001) pp. 73-81.
[2] H. Toshiyoshi and H. Fujita, Electrostatic micro torsion mirrors for an
optical switch matrix, J. Microelectromechanical Systems, 5(4) (1996)
231-237.
[3] O. Degani, E. Socher, A. Lipson, T. Leitner, D.J. Setter, S. Kaldor, and
Y. Nemirovsky, Pull-in study of an electrostatic torsion microactuator, J.
Microelectromechanical Systems, 7(4) (1998) 373-379.
[4] J. B|hler, J. Funk, J.G. Korvink, F-P Steiner, P.M. Sarro, and H.
Baltes,
Electrostatic aluminum micromirrors using double-pass metalliztion, J.
Microelectromechanical Systems, 6(2) (1997) 126-135.
Regarding to bilaye cantilever beam, a paper from M.C. Wu's group may be
useful for you.
[1] R.T. Chen, H. Nguyen, and M.C. Wu. A low voltage micromachined optical
switch by stress-induced bending. In Proceedings of Twelfth IEEE International
Conference on Micro Electro Mechanical Systems (MEMS 99), Florida USA, pp.
424-428, 1999.
Rgds,
Zhang Xuming
-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of LEOW Cheah Wei
Sent: Friday, January 25, 2002 7:41 PM
To: [email protected]
Subject: [mems-talk] electrostatic pull-in voltage for cantilever beam
Dear everybody,
can somebody post or point to some link on measured data for pull-in
voltage of a
1) cantilever beam
2) bilayer cantilver beam (e.g. poly2 with metal from MUMPS and it is curved
)
3) related structure
i'm interested in simulating/modeling the pull in voltage Vs beam
length. The data will be very useful in verifying the result.
thank you
LEOW Cheah Wei
master student
Universiti Teknologi Malaysia
http://www.geocities.com/cheah_wei
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