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MEMSnet Home: MEMS-Talk: Statistical Process Control (SPC)
Statistical Process Control (SPC)
2002-01-27
Roger Brennan
2002-01-28
Vic Kley
Statistical Process Control (SPC)
Roger Brennan
2002-01-27
Has anyone found a Statistical Process Control (SPC) book or software program
they like?
I need to set up something for a small fab and track the usual things: sheet
rho, thicknesses, etch depths, critical dimensions, etc.

Thanks very much,

Roger Brennan
Home:
1403 Forrestal Avenue
San Jose, CA 95110
(408)453-0711 (telephone)
(408)573-9407 (fax)
[email protected]

Work:
Endevco
355 N. Pastoria Ave.
Sunnyvale, CA 94085
408-739-3533 ext 204
[email protected]

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