you may use image reversal with AZ5214 type resist or ammonia image reversal
process fro Shippley1800 or 1000 series
http://www.cnf.cornell.edu/Equipment/PhotoLith/Photolith.html


> -----Original Message-----
> From: Peng Jin [SMTP:[email protected]]
> Sent: Tuesday, January 29, 2002 5:34 AM
> To:   [email protected]
> Subject:      [mems-talk] Negative Photoresist
>
> Hi, friends,
>
> In my research project, I need to find a kind of negative photoresist
> which
> must be easy to remove by acetone or other chemical solvent. Could anyone
> give
> me some idea about it?
>
> Thanks.
>
> Peng Jin
> _______________________________________________
> [email protected] mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.mems-exchange.org/