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MEMSnet Home: MEMS-Talk: Chromium-Silicon Adhesion
Chromium-Silicon Adhesion
1996-07-09
[email protected]
1996-07-15
[email protected]
Chromium-Silicon Adhesion
[email protected]
1996-07-09
Dear MEMS community:

Can someone suggest references for the adhesion strength of evaporated
chromium on silicon and SiO2 ?

Interface adhesion strengths of other adhesion promoters like Ti on
silicon/oxide would also be useful.

Thanks in advance.
--
Bharat Shivkumar
Micro-Manufacturing Laboratory
Mechanical and Aerospace Engg Dept.
UCLA  CA 90095
(O) (310) 825-3977     (H) (310) 824-5402


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