Hello Heike
I don't know if this will help you,
but FERRO  makes a glass that is designed to be fairly close in CTE to
Silicon:  IP700 series.
They also have a process that you can use to incorporate the frit into SC450
 photoresist.
(Actually, we use  "SC" resist that is ~450 cp, apparently not controlled to
as tight a tolerance as "SC450",...but I can buy it in 1 gal containers and
it suits my needs just fine, while the "SC450" comes only in larger
packaging quantities)
Liz

> From: Heike Bartsch de Torres 
> Reply-To: [email protected]
> Date: Mon, 04 Feb 2002 17:22:25 +0000
> To: Lior Grossman , [email protected]
> Subject: [mems-talk] RE: Foturan photo-etchables glass Bonding to Silicon
> Wafer
>
> hi Lior,
> as I know, it is not possible to reduce the CTE mismatch betwenn silicon
> and photosensitive glasses because of the composition of this kind of
> glasses. There is a research group at the Technical University Ilmenau,
> Germany dealing with this subject. You can contact Mr. Alf Harnisch,
> e-mail: [email protected] 
> By the way, it is also possible to structure pyrex or any kind of glass
> by sandblasting. For information contact:
> Little Things Factory 
> Germany
> Regards Heike
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