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MEMSnet Home: MEMS-Talk: Rectangular wafer cassettes
Rectangular wafer cassettes
2002-02-04
Eric Lagally
2002-02-05
Klauder, Jr., Philip R.
2002-02-05
Mac McReynolds
2002-02-05
Roger Brennan
2002-02-07
Liz Shelley
2002-02-08
Roger Brennan
Rectangular wafer cassettes
Eric Lagally
2002-02-04
Hi,

     We will be starting a project using rectangular
glass slides (25 x 75 mm and 21 x 75 mm), and we are
in need of ways to hold these slides for etching and
cleaning processes (HF, Pirahna, etc.).  Does anybody
know of a source for such things?  I know Entegris
sells custom-sizable carriers, but they are designed
for transport, and the materials they are made from
(i.e., stainless steel) aren't good in etches.  Any
help is appreciated.

                         Eric




=====
Eric Lagally
UCB/UCSF Joint Bioengineering Graduate Group
Mathies Research Laboratory
313 Lewis Hall
Berkeley, CA 94720
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