Dear MEMS-talk members,

I am trying to gather information on processing SU-8 in uncontrolled
environment. By "uncontrolled" I mean the environment, where amine and
airborne contamination levels are not controlled, and therefore can result
in T-top formation. Does anybody use SU-8 to image geometries of 1 5m and
larger under the regular conditions? Does anybody observe dramatic T-tops
for 1 5m features? I know that the atmosphere is very important, when one
talks about processing chemically amplified resists. I also know that it is
extremely critical for obtaining really small features (less than 0.5 5m),
which is not the case in my study.

I appreciate it a lot if somebody shares his/her experience with me.

Thank you very much in advance,


Inna Mushkatinskaya

Sr. Process Specialist
Anvik Corporation
6 Skyline Drive
Hawthorne NY 10532

Tel: 914-345-2442, etx.18
Fax: 914-345-2452

Web: www.anvik.com
E-mail: [email protected]