> Do you know of some references on "health and safety instructions" for
> plasma processing? Those books on plasma processing which I
> know don't cover this topic.
> I would like to learn about the toxicity of the exhaust
> gases, equipment contamination, etc.

Some of this is covered in the book
Dennis M. Manos and Daniel L. Flamm, editors,
"Plasma Processing: An Introduction," Academic Press, 1989,
Chapter 7 (pp. 425-470) by G. K. Herb,
"Safety, Health, and Engineering Considerations
for Plasma Processing."