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Titanium in MEMS
2002-02-18
Conor O'Mahony
Titanium in MEMS
Conor O'Mahony
2002-02-18
Hi all,

Looking through the literature, it appears that titanium is used widely in
MEMS as part of composite structures or shape-memory alloys, but rarely as a
stand-alone material (in comparision to, say, aluminium or nickel). Is there
a reason for this, i.e. is Ti unsuitable for use on its own?

Regards,

Conor O'Mahony


*************************************************
Conor O'Mahony
Transducers Group,
National Microelectronics Research Centre(NMRC),
Lee Maltings, Prospect Row, Cork, Ireland.

Tel: +353 21 4904112    E-mail: [email protected]
Fax: +353 21 4270271    WWW: http://www.nmrc.ie
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