Hi YK,

In theory, electrophoretic resist deposition is a self-limiting
process and the thickness depends solely on the voltage. But we
found that time (and various other parameters not fully under-
stood yet) also play a role.
We achieved PEPR thickness of 10-30um at 100-200V. In a watery
bath I personally would't dare to apply much higher voltages.
Consistent thickness control is difficult and we found that a
good recirculation system and a well-kept bath is very important.
Some components also evaporate over time and need to be topped
up if you keep the bath over long periods (At the price of PEPR,
chances are you have to).
Shipley and Semitool (they are developing a plating bath for
PEPR, which gives MUCH better results than our modified metal
plating bath or any desktop beaker setup) are helpful and you
can also contact them.
Please reply to me directly if you would like a more detailed
discussion.

Greetings,
        Frank Berauer
        Senior R&D Engineer
        Hewlett-Packard Singapore


-----Original Message-----
From: Whye-Kei Lye [mailto:[email protected]]
Sent: 15 February 2002 05:50
To: [email protected]
Subject: [mems-talk] Ultra-thick Electrodeposited Resists


Hi all,

I am looking to use Shipley's PEPR 2400 electrodeposited positive resist
for making 200 - 200 micron thick coatings.  Does anyone know if this is
possible/realistic?  What sort of thicknesses are possible with this
resist?

Any insight would be greatly appreciated.

Thanks in advance,

yk

____________________________________________________________________________
__

Whye-Kei Lye, Ph.D.
Research Scientist
Department of Electrical and Computer Engineering
University of Virginia
434-982-2374
[email protected]
____________________________________________________________________________
__
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