Dear MEMS-talk members,
Can anyone suggest a thick polyimide that will allow for coating of about 50
5m thick layers and thicker in a single coat?
My goal is to ablate the polyimide with excimer laser at 308nm and get high
aspect ratios.
I was looking into Pyralin Series manufactured by HD Microsystems, but the
thickest polyimide that they sell gives ~305m coating.
I appreciate any information that you can share with me.
Thanks,
Inna Mushkatinskaya
Sr. Process Specialist
Anvik Corporation
6 Skyline Drive
Hawthorne NY 10532
Tel: 914-345-2442, etx.18
Fax: 914-345-2452
Web: www.anvik.com
E-mail: [email protected]
