hello everyone,
I'm currently developing a fabrication process for a
MEMS switch. I am using PMGI as a sacrificial layer to
fabricate a suspended bridge membrane made of gold.
However I am having problems with the membrane
release, I am using AZ400 developer to release the
membrane. If anyone has worked with PMGI before I
would be greatly appreciative if they can provide me
with information on:
1) Solvents that I can use with PMGI.
2) The PMGI layer is patterned as a patch on top of a
CPW structure; thus the profile of the PMGI follows
the contours of the CPW structure. How can I produce a
maximally flat PMGI layer even if there are height
variations underneath?
3) has anyone tried plasma etching the PMGI?
Thanks and all the best!

Yazan Hijazi
Future Aerospace Science and Technology Center For
Space Cryoelectronics (FAST Center)
Florida International University
(305) 348-1825
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