Good day all,
  Recently I did a KOH etching of Si to make a thin diaphragm to be used
as a pressure sensor. The diaphragm that was etched was very rough on
the backside. Does anyone know how I can etch Si so it gives an almost
perfect smooth surface?

Thank you.
Ryan

Ryan D. Pooran
Graduate Student
Microelectronics- Photonics Graduate Program
University of Arkansas
248 Physics Building
Fayetteville, AR
72701
Ph: 501-575-5596(O)
Ph: 501-575-4150(L)
Email: [email protected]