I may be jumping to conclusions but- Were you using a wafer polished on both
sides? If so, who was your wafer supplier- If they are not double polishing
experts, they may be introducing a lot of mechanical damage to the wafer
that shows up as etch defects. How deep are you etching each side? Are you
getting good agitation on both sides?
Phil Klauder
215-646-7400 x2151
-----Original Message-----
From: Ryan D. Pooran [mailto:[email protected]]
Sent: Saturday, March 02, 2002 8:28 PM
To: [email protected]
Subject: [mems-talk] Smooth KOH etching
Good day all,
Recently I did a KOH etching of Si to make a thin diaphragm to be used
as a pressure sensor. The diaphragm that was etched was very rough on
the backside. Does anyone know how I can etch Si so it gives an almost
perfect smooth surface?
Thank you.
Ryan
Ryan D. Pooran
Graduate Student
Microelectronics- Photonics Graduate Program
University of Arkansas
248 Physics Building
Fayetteville, AR
72701
Ph: 501-575-5596(O)
Ph: 501-575-4150(L)
Email: [email protected]
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