Hello Lin,

You can get these from Virginia Semiconductor Inc
at (540) 373-2900 in Frederickburg Virginia.
They also have substrates as thin as 5 um.
Ask for Perry or Liz.

Good Luck,

Stephen Jones
University of Virginia
EE dept.

>>
>> I'd like to get some 3", N(100), resistivity>5 Ohm-cm, 200um thick wafers.
>> Does anybody know where I can get them?  Besides, I want to etch polyimide
>> film the wafer, does anybody know the etchant for the polyimde wet etching?
>> Any reply will be appreciated. Thanks in advance,
>> Best regards,
>>
>> Lin
>>
>> **************************************************
>> Lin Wang,  Graduate Student
>> Department of Electrical and Computer Engineering
>> Beckman Institute, Rm B428C
>> University of Illinois at Urbana-Champaign
>> 405 North Mathews Avenue
>> Urbana, IL 61801
>>
>> e-mail: [email protected], [email protected]
>> Tel. (217)-333-1088(O), (217)-351-8976(R)
>> **************************************************
>>
>>
>>
>>