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MEMSnet Home: MEMS-Talk: Pt deposition on glass or silicon
Pt deposition on glass or silicon
2002-03-05
Hongjun Zeng
2002-03-07
JAMES.R.THORPE
2002-03-06
Michael D Martin
2002-03-06
[email protected]
Pt deposition on glass or silicon
JAMES.R.THORPE
2002-03-07
Another trick you could try is to anneal the Pt coated substrates.

I've done this with Ag coated glass slides (220 degC for 1 minute in
an N2 atmosphere) and seen a marked improvement in film adhesion.

Rgds

Jim.
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Dr Jim Thorpe
Research Fellow

Institute of Microwaves and Photonics
School of Electronic and Electrical Engineering
The University of Leeds
Leeds
LS2 9JT

United Kingdom

Tel: +44 (0)113 233 2049 (Office)
Tel: +44 (0)113 233 2084 (Lab)
Fax: +44 (0)113 244 9451
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