Hi,

We use OAI aligners and we have an OAI instrument which can be used to
measure the output in mW/cm2. It's a fairly simple piece of kit and isn't
attatched to the aligner, I don't know whether they sell it as a seperate
unit, but I don't see why they wouldn't.

Not that's it's really relevant unless you per chance have exactly the same
aligner, but our i-line units put out just over 20mW/cm2.

Regards,

Kevin Banks

>From: anshu mehta 
>Reply-To: [email protected]
>To: [email protected]
>Subject: [mems-talk] SU-8 exposure and parylene
>Date: Thu, 7 Mar 2002 20:00:10 -0800 (PST)
>
>Hi
>  I am using Su-8 5 as a structural layer for my
>device. I looked up Microchem website and they give
>the exposure in terms of mJ/cm2. Is it possible to
>find a rough estimate for exposure time on a
>particular aligner using the mJ/cm2 data?
>
>Also, I wanted to know if it possible to pattern
>parylene?
>
>Thanks,
>Anshu mehta.
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