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MEMSnet Home: MEMS-Talk: Wafer Drying
Wafer Drying
2002-03-11
Roger Brennan
2002-03-11
Bill Moffat
2002-03-11
[email protected]
2002-03-11
Mark West
Wafer Drying
[email protected]
2002-03-11
White magic I would think. There are a couple of companies that offer similar
systems. I thought Mattson offered both Marigoni and CFM vapor dry which are
similar. Cost might be an issue with these systems and an old iso dryer with
coils seems to work just fine last time I checked. Bob Henderson

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