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MEMSnet Home: MEMS-Talk: for the maximum allowable strain of single-crystal slilicon
for the maximum allowable strain of single-crystal slilicon
2002-03-12
feng qian
for the maximum allowable strain of single-crystal slilicon
feng qian
2002-03-12
hello,everyone:
           I'll do a calculation about single-crystal silicon. But I don't know
the maximum allowable strain of single-crystal silicon. I only know that of the
polysilicon.
           Do any of you have information on that?
           Thanks!
            Qian Feng

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