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MEMSnet Home: MEMS-Talk: RE: mems-talk digest, Vol 1 #225 - 6 msgs
RE: mems-talk digest, Vol 1 #225 - 6 msgs
2002-03-15
Ruggiero, Dara
RE: mems-talk digest, Vol 1 #225 - 6 msgs
Ruggiero, Dara
2002-03-15
Regarding:  Glen Landry 
Subject: [mems-talk] SU-8 spinning problems

I had similar difficulties with SU-8.  One method that seemed to work for us was
to squeegee a thin layer of SU-8 across the entire substrate.  Then immediately
add more resist in the center, the usual amount, and spin.  A quick and dirty
solution, but it worked for us and kept my substrates from looking like spin
art.  Best of luck to you.

Dara Ruggiero
Harris Corporation

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