Martin,
       It may be possible to use silylation.  If you use a Photo sensitive
Polymide and expose it you will get an indene carbo-oxylic acid where you
expose.  Then if you put it in a higher than normal pressure HMDS primer the
silane will react with the acid and leave behind a Si(CH3)3 in the exposed
area.  Then treat with a low pressure Oxygen plasma it will oxidize the
Silicon.  This is a standard process in deep U.V. exposure areas.  I can
implant the Si(CH3)3 in one of my silylation units the plasma may be tricky.
It needs to be low pressure, below 10 Torr, and that usually says expense,
The Applied Materials 5000 is an example at about $1,000,000.00.  The
Silylation unit is as low as $50,000.00.  Hope this helps Bill Moffat

-----Original Message-----
From: Martin De_Kegelaer [mailto:[email protected]]
Sent: Monday, March 25, 2002 1:50 AM
To: [email protected]
Subject: [mems-talk] SiOC coating


Dear Mems specialists,

Does anyone knows who can coat SiOC on a polyimid substrate for us?

Thank you and best regards,

Martin De Kegelaer
AGFA-GEVAERT N.V.
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