Hi All,

I'm trying to make a bimorph cantilever based on Si substrate that can be used
up to 500C or 932K. One layer is Si, The other layer should have large Thermal
Expansion Coefficient (TEC) to give large tip deflection like metal. But it also
has to be strong enough to use under that high temperature and stick well to Si.
Anyone did this before or has any idea of the second material and how to
fabricate it will be very helpfull. Thank you.

Wuyong Peng
MRC, NJIT