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MEMSnet Home: MEMS-Talk: How to remove silicon grease after DRIE?
How to remove silicon grease after DRIE?
2002-04-01
zhang liuqiang
How to remove silicon grease after DRIE?
zhang liuqiang
2002-04-01
Dear friends,

Does somebody know about how to remove the silicon
grease used in DRIE for bonding device wafers to
handle wafers. Any suggestion will be highly
appreciated.

Thanks,
Liuqiang Zhang

Phone: 781-933-0513 ext. 204
Email: [email protected]
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