Ok, so that's electrodeposition or electroplating or commonly refered to as
plating that we are talking about, right?

Sure I don't see why it is diffucult to do that in a cleanroom environment.
The only thing you have to worry about is cross contamination. Make sure
that you have a bench (or hood) that is desiginated for Cu plating only. If
you are not sharing the cleanroom with CMOS people, then I don't think
anyone would object. Just purchase the plating bath from any of the
reputable companies (Technics, for instance, although I don't work for
them...). Obviously you need a power supply and a copper plate. A large
beaker, with stir bar...

Why were you concerned?

Henry Yang

"Wuyong Peng" @memsnet.org on 03/29/2002 09:33:28 AM

Please respond to [email protected]

Sent by:    [email protected]


To:    
cc:
Subject:    Re: [mems-talk] Cu Electric Deposition in Cleanroom?



Yes. It is also called plating. Any idea I can do it in a cleanroom
environment? Thanks in advance.

Wuyong Peng


----- Original Message -----
From: "Henry Yang" 
To: 
Sent: Thursday, March 28, 2002 9:30 PM
Subject: Re: [mems-talk] Cu Electric Deposition in Cleanroom?


> WHat do you mean electric depositon? Is that the same as
electrodeposition,
> as in electroplating?
>
> Henry Yang
>
> "Wuyong Peng" @memsnet.org on 03/28/2002 09:25:51 AM
>
> Please respond to [email protected]
>
> Sent by:    [email protected]
>
>
> To:    
> cc:
> Subject:    [mems-talk] Cu Electric Deposition in Cleanroom?
>
>
>
> Does anyone know if there is a cleanroom that allow Cu electric
deposition
> and
> etching? Thank you.
>
> Wuyong Peng
> MRC, NJIT
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