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MEMSnet Home: MEMS-Talk: Full Wafer Bonding
Full Wafer Bonding
2002-04-03
Steffan Anon
bonding SU-8 to GaAs
2002-04-03
Christopher F. Blanford
2002-04-03
Palensky Joshua
Full Wafer Bonding
Steffan Anon
2002-04-03
Hi everyone,

I'm looking for Information about full wafer bonding of 3 inch wafers using
polyimide or SOG (Spin on Glas) as intermediate layer.

We try to bond GaAs to glas with an optical transparent layer that is resistant
to temperatures up to 300 degree celsius.

Best regards

Zomy



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