A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: bonding SU-8 to GaAs
Full Wafer Bonding
2002-04-03
Steffan Anon
bonding SU-8 to GaAs
2002-04-03
Christopher F. Blanford
2002-04-03
Palensky Joshua
bonding SU-8 to GaAs
Christopher F. Blanford
2002-04-03
Hello

Does anyone know of a method to bond thin films of SU-8 photoresist to
gallium arsenide? The feature size in the developed resist is around
250-300 nm.

Thanks,

Chris Blanford

--
Christopher F. Blanford
Inorganic Chemistry Laboratory, South Parks Road, Oxford, OX1 3QR, UK
Phone: (44)/(0)-1865-282603; Fax: (44)/(0)-1865-272690
PGP keyID: 356CC429  http://pgp.ai.mit.edu/

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Tanner EDA by Mentor Graphics
Nano-Master, Inc.
University Wafer
Process Variations in Microsystems Manufacturing