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MEMSnet Home: MEMS-Talk: reducing selectivity of KOH
reducing selectivity of KOH
1996-08-18
Alexander Barr
reducing selectivity of KOH
Alexander Barr
1996-08-18
Howdy,

Does anyone know how to REDUCE the selectivity of the 100:111 planes for
KOH etches of silicon.  I do wish to stay with the KOH chemistry.

thanks

ALEXANDER BARR
[email protected]


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