Hi,
   It is possible the surface tension of the platinum varies.  If this is the
case 2 possible answers.  1) Uniform plasma treatment with an inert gas,
Argon, to produce a goniometer reading of under 5 degrees every where on the
Platinum.  Or 2) a vacuum vapor prime to produce uniform dehydration followed
by uniform HMDS treatment.  Again a goniometer reading will point out the
uniformity.  If you need to test any of the above we have a goniometer,
demonstration plasma equipment and demo vacuum vapor prime.  We have great
success with prime sent by mail but plasma will break down  with time.  Bill
Moffat

-----Original Message-----
From: penghui zhao [mailto:[email protected]]
Sent: Thursday, April 04, 2002 2:44 PM
To: [email protected]
Subject: [mems-talk] uniform of resist on Platinum


 Hi, guys

I have read letter son the web page, so I want you to help me with the
nonuniformity. I met one problem when I spin resist on the Platinum, the
resist is not uniform. I do not make it yet.The resist used is  S 1805
photoresist containing: propylene glycol monomethyl either acetate, and the
adhesion promoter is AP010 HMDS. Would you please give me some suggestions to
solve this problem to get uniform spin coating?  Thanks a lot!

Sincerely yours

Penghui Zhao

Deparment of Materils Science

University of North Texas
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