Hi,
...you can try a buffererd HF. The result can you check by measurment the
contact-angle.
Jens Tuchscheerer



----- Original Message -----
From: ">gAvC6" 
To: 
Sent: Thursday, April 11, 2002 5:48 AM
Subject: [mems-talk] HOW to remove OTS SAM on silicon layer??


> I want to get rid of OTS ( Octadecyltrichlorosilane ) coating layer on
silicon sub.
>
> Specially, I want to know which chemical can remove the OTS SAM.
>
> If you have any suggestion, It's very thanksful for me.
>
> ****
> Nano-Tribology Research Lab.Yonsei University, Korea.
>  Ji Chul Yang
>
>  [email protected]
>
>   Have a nice day.
> *****
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