I would suggest getting a cheap, surplus LPCVD tube. You could even modify
the front cap for a mechanical feed through. It could easily be made to
operate in the pressure and temperature range you need, and its off the
shelf.
ADAM
-----Original Message-----
From: anshu mehta [mailto:[email protected]]
Sent: Thursday, April 11, 2002 2:02 PM
To: [email protected]
Subject: [mems-talk] vacuum oven
Hi
We are inetrested in buying a vacuum oven which could
to a pressure range of few torr or less and can go up
to temperatures of 400-500C. Also, we want it to have
a mechanical feedthrough to be able to apply pressure
. We want to put a device inside, cover it and seal
using glass frits. the high temperature is required
for firing of glass frits.
Kindly suggest if such oven would be available
off-the-shelf or if we could get it custom made from
somewhere.
Thanks,
Anshu mehta