Dear College,
I'm designing the test mask for our new DRIE tool. I want to know the design
rule of comb drive?
For SOI wafer with 100um (50um) top Si. Can I use 7um (4um) for width of
comb finger? Can I get even smaller tolerance for gap between comb fingers,
say, 2um?
Please give me your comment as soon as possible,
Thanks in advance,
MEMS Lab.
Mechanical Engineering Dept.
Univ. of Maryland
College Park
MD 20742
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Tel: 301-405-2981
301-403-8389
Fax: 301-403-2976
Email: [email protected]
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