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MEMSnet Home: MEMS-Talk: Wet etch of SOI
Wet etch of SOI
2002-04-20
Peng Yao
2002-04-22
Mighty Platypus
2002-04-23
Peng Yao
2002-04-24
Mighty Platypus
2002-04-26
Ravi Shankar
2002-04-24
[email protected]
Plasma etch of BCB
2002-04-24
Lester Lopez
Wet etch of SOI
Ravi Shankar
2002-04-26
no phosphoric acid does not attack silicon to a great amount
Regds
Ravi Shankar
Semiconductor Complex Ltd
India


On Tue, 23 Apr 2002, Peng Yao wrote:

> Hi Jesse,
> Will phosphoric acid attack Silicon as well?
> Thanks
>
> Peng Yao
> DOEs lab
> Electrical Engineering Dept.
> Univeristy of delaware
> Newark D.E 19716
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