coventorware

http://www.coventor.com/rf-mems/
For The resonator you need to simulate,
you might want to AC voltage, they have a few trick to be able to do this, as a
advanced user for the software. This software is a user friendly.

Try it , we are using it for almost two years.
I think you can get a demo for 30 days
Faheem



> Dear MEMS guys:
>
> I am looking for the design and simulation tool for the RF MEMS,
> especially
> Resonator.
>
> Could you please give me any suggestions? Thanks a lot.
>
> Yaojian Lin
> SyChip, Inc.
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***********************************
Faheem F. Faheem
University of Colorado
Mechaical Engineering
Campus Box 427
Boulder, CO 80309
PH: 303-492-0877
Fax: 303-492-3498
http://mems.colorado.edu
***********************************