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MEMSnet Home: MEMS-Talk: PDMS pillar shape
PDMS pillar shape
2002-05-16
Bo He
2002-05-16
Bill Moffat
2002-05-17
mmf
2002-05-20
Bill Moffat
2002-05-20
mmf
PDMS pillar shape
mmf
2002-05-17
Bill,

"Then flowing TEOS around the reversed image photo resist he defined
contacts with vertical side walls..."

How did he do it?

mateen

reply
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