Dear Jing,

I do not know the other metals but diluted HF removes thin Ti layers.

Oray Orkun Cellek
Middle East Technical University
Electrical & Electronics Engineering Department
Ankara
Turkey
----- Original Message -----
From: Jing Liu
Sent: Wednesday, May 22, 2002 9:13 AM
To: [email protected]
Subject: [mems-talk] metal with HF?

To who may concern,

Does anyone know whether thin coated film of Cu could resist concentrated HF
etching? How about other metal like Ni and Ti? Are there any reference I
could
find?

Jing
_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.mems-exchange.org/Get more from the Web.  FREE MSN
Explorer download : http://explorer.msn.com