Hi:
Karl. Thanks for your idea. I bought a 1800W hair dryer as a heat gun. First
I blew the wafer for some time. Then I dipped melted wax on the glass
surface to spin. It works very well. I don't use spreading, just dippped the
melted wax when the wafer has started spun.

Also thanks Luesebrink for providing the information for me. I think the
equipment EVG850 is very cool and perfect for my project. I doubt there is
any possibility for me to use it. It is up to my advisor.
Thanks again for your help. Your company is very interesting. I am asking
for some fulltext paper from your company.

Best wishes,
Gaoshan

----- Original Message -----
From: "Karl Cazzini" 
To: 
Sent: Thursday, May 23, 2002 10:39 AM
Subject: Re: [mems-talk] Spin coat wax on glass wafer


> Try heating the substrate using a heat-gun. Load the substrate with the
solid wax (powdered or milled) and melt it so that the wax is pooled in the
surface of the (heated) substrate. When the wax has completly melted,
initiate the spin cycle. (The wax will solidify from the air/wax interface
first, while remaining molten underneath. This should allow enough time for
the wax to coat the substrate in a thin film. You may need to experiemnt
with timing the removal of the heat source before / afer the spoinning
process. As long as the molten wax wets the glass substrate, this method
WILL work if you spend some time experimenting with the conditions.
>
> Karl Cazzini (Ph.D)
> Senior Scientist
>
>
> > From: "Gaoshan Jing" 
> > Date: 2002/05/23 Thu AM 02:51:34 EDT
> > To: 
> > Subject: [mems-talk] Spin coat wax on glass wafer
> >
> > Hi:
> > Folks. I am trying to spin coat a thin film of wax on a 2 inch glass
wafer. I
> > made wax solution by diluting wax in butanol. But it is difficult to get
> > uniform wax film. Does anyboby have some good advice for me?
> >
> > Thanks in advance.
> > Gaoshan Jing
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